annular illumination
 

* 1.a technique utilized in certain steppers (see step and repeat and step and scan) whereby illumination is provided by a ring centered around the optical axis. Annular or >off-axis illumination can increase resolution by allowing more diffraction orders into the lens system

English Related Words* annular

* annular area

* annular barrel vault

* annular coil clearance

* annular eclipse

* annular flow

* annular gilt head

* annular scotoma

* annular section

* annular spring

* annular valve

* annular vault

* annularis

* annularity

* annularry